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1. Identity statement
Reference TypeJournal Article
Sitemtc-m21b.sid.inpe.br
Holder Codeisadg {BR SPINPE} ibi 8JMKD3MGPCW/3DT298S
Identifier8JMKD3MGP5W34M/3GD3GM7
Repositorysid.inpe.br/mtc-m21b/2014/05.30.02.24.05   (restricted access)
Last Update2014:07.28.17.16.32 (UTC) administrator
Metadata Repositorysid.inpe.br/mtc-m21b/2014/05.30.02.24.06
Metadata Last Update2021:07.28.22.27.56 (UTC) administrator
DOI10.1116/1.4874308
ISSN1071-1023
Labelscopus 2014-05 BarbosaBaldTravCora:2014:AcEnGr
Citation KeyBarbosaBaldTravCora:2014:AcEnGr
TitleActivation energies for the growth of diamond films and the renucleation of diamond grains during film growth
ProjectPNPD/CAPES (proc. #02491/09-5); FAPESP (proc. #11/17526-0)
Year2014
MonthMay/June
Access Date2024, May 19
Type of Workjournal article
Secondary TypePRE PI
Number of Files1
Size2391 KiB
2. Context
Author1 Barbosa, Divani Carvalho
2 Baldan, Mauricio Ribeiro
3 Trava-Airoldi, Vladimir Jesus
4 Corat, Evaldo Jose
Resume Identifier1
2 8JMKD3MGP5W/3C9JHTA
3
4 8JMKD3MGP5W/3C9JH33
Group1 LAS-CTE-INPE-MCTI-GOV-BR
2 LAS-CTE-INPE-MCTI-GOV-BR
3 LAS-CTE-INPE-MCTI-GOV-BR
4 LAS-CTE-INPE-MCTI-GOV-BR
Affiliation1 Instituto Nacional de Pesquisas Espaciais (INPE)
2 Instituto Nacional de Pesquisas Espaciais (INPE)
3 Instituto Nacional de Pesquisas Espaciais (INPE)
4 Instituto Nacional de Pesquisas Espaciais (INPE)
Author e-Mail Address1 divani@las.inpe.br
2 baldan@las.inpe.br
3 vladimir@las.inpe.br
4 corat@las.inpe.br
e-Mail Addressmarcelo.pazos@inpe.br
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume32
Number3
Pages031808
Secondary MarkA2_ENGENHARIAS_III A2_ENGENHARIAS_IV B1_ENGENHARIAS_II B2_ASTRONOMIA_/_FÍSICA
History (UTC)2021-07-28 22:27:56 :: administrator -> marcelo.pazos@inpe.br :: 2014
3. Content and structure
Is the master or a copy?is the master
Content Stagecompleted
Transferable1
Content TypeExternal Contribution
Version Typepublisher
Keywordsdiamond films
diamond grains
film growth
AbstractThe effect of substrate temperature upon the growth rate and the properties of diamond thin films grown with different grains sizes is explored. An argon-free and argon-rich gas mixture of methane and hydrogen is used in a hot filament chemical vapor deposition reactor. Characterization of the films is accomplished by scanning electron microscopy, Raman spectroscopy and high-resolution x-ray diffraction. Arrhenius plots of the mass gain, thickness growth, and renucleation rate as a function of the substrate temperature are used to obtain the values of the activation energies. An extensive comparison of the activation energy values obtained in this study with those found in the literature suggests that there are distinct common trends for microcrystalline and ballaslike diamond growth. Besides the activation energy values, the morphology, crystallite size, sp2 quantification, mass gain, thickness growth, and renucleation rate present similar tendencies with the substrate temperature, despite a large variation in the gas mixture composition. Included is a discussion of the possible reasons for these observations.
AreaFISMAT
Arrangementurlib.net > BDMCI > Fonds > Produção anterior à 2021 > LABAS > Activation energies for...
doc Directory Contentaccess
source Directory Contentthere are no files
agreement Directory Contentthere are no files
4. Conditions of access and use
Languageen
Target File1.4874308.pdf
User Groupadministrator
marcelo.pazos@inpe.br
Reader Groupadministrator
marcelo.pazos@inpe.br
Visibilityshown
Archiving Policydenypublisher allowfinaldraft
Read Permissiondeny from all and allow from 150.163
Update Permissionnot transferred
5. Allied materials
Mirror Repositoryiconet.com.br/banon/2006/11.26.21.31
Next Higher Units8JMKD3MGPCW/3ESR3H2
Citing Item Listsid.inpe.br/mtc-m21/2012/07.13.14.56.32 3
sid.inpe.br/bibdigital/2013/09.24.19.30 2
URL (untrusted data)http://dx.doi.org/10.1116/1.4874308
DisseminationWEBSCI; PORTALCAPES; COMPENDEX; SCOPUS.
Host Collectionsid.inpe.br/mtc-m21b/2013/09.26.14.25.20
6. Notes
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7. Description control
e-Mail (login)marcelo.pazos@inpe.br
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